Measurement Technology for Micro-Nanometer Devices
An important reference for experts and students engaged in micro-nano device (MND) measuring technology, this book collects the latest research from production and academia on MND test technology, especially in the basic theories and experimental methods of MND online testing, dynamic testing, and typical device testing. It explains the methodologies in a simple and concise way, introducing MND measuring technology systematically and comprehensively, with cutting-edge research findings and technical practicality. A fully comprehensive examination of state-of-the-art technologies for measurementon a small scale Highlights the advanced researc…
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Produktdetails
Weitere Autoren: Chou, Xiujian / Shi, Tielin / Ma, Zongmin / Bao, Haifei / Chen, Jingdong / Chen, Liguo / Li, Dachao / Xue, Chenyang
- ISBN: 978-1-118-71799-8
- EAN: 9781118717998
- Produktnummer: 21577078
- Verlag: John Wiley & Sons
- Sprache: Englisch
- Erscheinungsjahr: 2016
- Seitenangabe: 344 S.
- Plattform: EPUB
- Masse: 29'944 KB
- Auflage: 1. Auflage
Über den Autor
WENDONG ZHANG, North University of China, China XIUJIAN CHOU, North University of China, China TIELIN SHI, Huazhong University of Science and Technology, China ZONGMIN MA, North University of China, China HAIFEI BAO, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China JING CHEN, Peking University, China LIGUO CHEN, Soochow University, China DACHAO LI, Tianjin University, China CHENYANG XUE, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, China
2 weitere Werke von Wendong Zhang:
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