Resonant MEMS
Fundamentals, Implementation, and Application
A must-have for any MEMS R&D group: for the first time fundamental and hard-to-come-by knowledge is combined in one ready reference.The book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then goes on to provide a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the latest applications of re…
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Produktdetails
Weitere Autoren: Dufour, Isabelle (Hrsg.) / Heinrich, Stephen M. (Hrsg.) / Josse, Fabien (Hrsg.)
- ISBN: 978-3-527-33545-9
- EAN: 9783527335459
- Produktnummer: 17064588
- Verlag: Wiley-VCH GmbH
- Sprache: Englisch
- Erscheinungsjahr: 2015
- Seitenangabe: 484 S.
- Masse: H25.3 cm x B17.9 cm x D3.2 cm 1'246 g
- Abbildungen: 150 schwarz-weiße und 20 farbige Abbildungen
- Reihenbandnummer: 11
- Gewicht: 1246
Über den Autor
101199623
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