Fundamentals of Semiconductor Manufacturing and Process Control
A practical guide to semiconductor manufacturing from process control to yield modeling and experimental designFundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts.Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the eq…
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Produktdetails
Weitere Autoren: Spanos, Costas J.
- ISBN: 978-0-471-78406-7
- EAN: 9780471784067
- Produktnummer: 2317808
- Verlag: Wiley
- Sprache: Englisch
- Erscheinungsjahr: 2006
- Seitenangabe: 463 S.
- Masse: H24.0 cm x B16.1 cm x D3.0 cm 888 g
- Gewicht: 888
Über den Autor
GARY S. MAY, PhD, is Professor in the School of Electrical and Computer Engineering at the Georgia Institute of Technology. Dr. May is a Fellow of the IEEE and Senior Member of the Society of Manufacturing Engineers. He has published more than 150 articles and given over 100 technical presentations in the area of IC computer-aided manufacturing.COSTAS J. SPANOS, PhD, is Professor in the Department of Electrical Engineering and Computer Sciences and the Associate Dean for Research for the College of Engineering at the University of California, Berkeley. Dr. Spanos is a Fellow of the IEEE and has published extensively in the area of semiconductor manufacturing.
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