CMOS Hotplate Chemical Microsensors
This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and represent examples of the successful integratio…
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Produktdetails
Weitere Autoren: Barrettino, Diego / Graf, Markus / Hierlemann, Andreas
- ISBN: 978-3-642-08910-7
- EAN: 9783642089107
- Produktnummer: 10559819
- Verlag: Springer Berlin Heidelberg
- Sprache: Englisch
- Erscheinungsjahr: 2010
- Seitenangabe: 140 S.
- Masse: H23.6 cm x B15.4 cm x D1.5 cm 225 g
- Auflage: Softcover reprint of hardcover 1st ed. 2007
- Abbildungen: Paperback
- Gewicht: 225
Über den Autor
56934495
2 weitere Werke von Henry P. Baltes:
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