Measurement Technology for Micro-Nanometer Devices

An important reference for experts and students engaged in micro-nano device (MND) measuring technology, this book collects the latest research from production and academia on MND test technology, especially in the basic theories and experimental methods of MND online testing, dynamic testing, and typical device testing. It explains the methodologies in a simple and concise way, introducing MND measuring technology systematically and comprehensively, with cutting-edge research findings and technical practicality. A fully comprehensive examination of state-of-the-art technologies for measurementon a small scale Highlights the advanced research work from industry and academia in MND test technology Written at both introductory and advanced levels, provides the fundamentals as well as advanced theories Focuses on the measurement techniques for characterizing MEMS/NEMS devices A fully comprehensive examination of state-of-the-art technologies for MND measurement, this book is aimed at graduate students in the fields of instrument science technology, precision manufacture, and optic instrument manufacture. It is also a valuable reference for engineers and researchers in micro- and nano-fabrication, MEMS/NEMS devices, and advanced instrumentation.