Nanolithography and Implications on Circuit Design
This book provides a comprehensive and updated state-of-the-art compilation on nanolithography and implications on future nanometer IC designs. Its scope in a bottom-up manner, includes the underlying equipment and process issues for nanolithography, the computational lithography aspects, and the key design and CAD issues and possible solutions. The subjects covered include: introduction of nanolithography process and trends; computational lithography (including lithography simulations, OPC, inverse lithography, pixilated mask, source mask optimization, etc.); lithography-aware analysis & design; and future lithography technologies and E…
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Produktdetails
Weitere Autoren: Singh, Vivek (Hrsg.)
- ISBN: 978-1-4419-6156-3
- EAN: 9781441961563
- Produktnummer: 6037354
- Verlag: Springer Nature
- Sprache: Englisch
- Erscheinungsjahr: 2012
- Seitenangabe: 400 S.
- Masse: H23.5 cm x B15.5 cm
- Auflage: Edition
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