Nanopositioning Technologies
Fundamentals and Applications
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
CHF 153.50
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Produktdetails
Weitere Autoren: Sun, Yu (Hrsg.) / Ru, Changhai (Hrsg.)
- ISBN: 978-3-319-23853-1
- EAN: 9783319238531
- Produktnummer: 19303223
- Verlag: Springer
- Sprache: Englisch
- Erscheinungsjahr: 2015
- Plattform: PDF
- Masse: 18'193 KB
6 weitere Werke von Xinyu (Hrsg.) Liu:
Micro and Nano Systems for Biophysical Studies of Cells and Small Organisms
Fundamentals and Applications
Fundamentals and Applications
Ebook (EPUB Format)
CHF 169.00
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