Mems Silicon Oscillating Accelerometers and Readout Circuits
Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output.MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS…
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Produktdetails
- ISBN: 978-87-7022-045-3
- EAN: 9788770220453
- Produktnummer: 29343532
- Verlag: River Publishers
- Sprache: Englisch
- Erscheinungsjahr: 2019
- Seitenangabe: 312 S.
- Masse: H24.0 cm x B16.1 cm x D2.1 cm 636 g
- Abbildungen: HC gerader Rücken kaschiert
- Gewicht: 636
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