Run-to-Run Control in Semiconductor Manufacturing
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine runs, thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
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Produktdetails
Weitere Autoren: Del Castillo, Enrique (Hrsg.) / Hurwitz, Arnon M. (Hrsg.)
- ISBN: 978-1-4200-4066-1
- EAN: 9781420040661
- Produktnummer: 18420674
- Verlag: Taylor & Francis Ltd.
- Sprache: Englisch
- Erscheinungsjahr: 2018
- Seitenangabe: 368 S.
- Plattform: PDF
- Masse: 6'656 KB
- Abbildungen: 27 schwarz-weiße Tabellen
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