Laser Heat-Mode Lithography
Principle and Methods
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a partic…
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Produktdetails
- ISBN: 978-981-1509-45-2
- EAN: 9789811509452
- Produktnummer: 35374010
- Verlag: Springer Singapore
- Sprache: Englisch
- Erscheinungsjahr: 2020
- Seitenangabe: 224 S.
- Masse: H23.5 cm x B15.5 cm x D1.2 cm 347 g
- Auflage: 1st ed. 2019
- Abbildungen: Paperback
- Gewicht: 347
Über den Autor
Jingsong Wei received the Ph.D. degree in Chinese Academy of Sciences. He is currently a Professor with Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences. He has published more than 120 articles in professional journals including Applied Physics Letters, Optics Express, Optics Letters, etc. His research interests include miro/nanolithography, super-resolution optics, and optical instruments.
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