Enabling Technologies for MEMS and Nanodevices
Advanced Micro and Nanosystems
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional siliconprocessing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in massdata storage and electrochemical imaging by means of scanning micro- and nanoprobes.The second section on…
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Produktdetails
Weitere Autoren: Brand, Oliver / Fedder, Gary K. / Hierold, Christofer / Korvink, Jan G. / Tabata, Osamu
- ISBN: 978-3-527-33498-8
- EAN: 9783527334988
- Produktnummer: 14554736
- Verlag: Wiley-VCH
- Sprache: Englisch
- Erscheinungsjahr: 2013
- Seitenangabe: 439 S.
- Masse: H24.0 cm x B17.0 cm x D2.6 cm 963 g
- Abbildungen: s/w. Tab.
- Gewicht: 963
Über den Autor
101245010
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