Soft X-Rays and Extreme Ultraviolet Radiation
Principles and Applications
This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful refere…
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Produktdetails
- ISBN: 978-1-139-63262-1
- EAN: 9781139632621
- Produktnummer: 16961809
- Verlag: Cambridge University Press
- Sprache: Englisch
- Erscheinungsjahr: 2007
- Seitenangabe: 0 S.
- Plattform: PDF
- Masse: 17'747 KB
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