Fundamentals of Nanoscale Film Analysis
Modern science and technology, from materials science to integrated circuit development, is directed toward the nanoscale. From thin films to field effect transistors, the emphasis is on reducing dimensions from the micro to the nanoscale. Fundamentals of Nanoscale Film Analysis concentrates on analysis of the structure and composition of the surface and the outer few tens to hundred nanometers in depth. It describes characterization techniques to quantify the structure, composition and depth distribution of materials with the use of energetic particles and photons. The book describes the fundamentals of materials characterization from the st…
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Produktdetails
Weitere Autoren: Feldman, L. C. / Mayer, James W.
- ISBN: 978-0-387-29260-1
- EAN: 9780387292601
- Produktnummer: 2211359
- Verlag: Springer Us
- Sprache: Englisch
- Erscheinungsjahr: 2007
- Seitenangabe: 352 S.
- Masse: H24.6 cm x B16.7 cm x D2.7 cm 641 g
- Auflage: 2007
- Abbildungen: HC runder Rücken kaschiert
- Gewicht: 641
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