CMOS Hotplate Chemical Microsensors
This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and represent examples of the successful integratio…
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Produktdetails
Weitere Autoren: Barrettino, Diego / Baltes, Henry P. / Graf, Markus
- ISBN: 978-3-540-69562-2
- EAN: 9783540695622
- Produktnummer: 12824610
- Verlag: Springer-Verlag GmbH
- Sprache: Englisch
- Erscheinungsjahr: 2007
- Plattform: PDF
- Masse: 3'708 KB
- Auflage: 2007
Über den Autor
89257771
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