Radio-Frequency Capacitive Discharges
The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical p…
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Produktdetails
Weitere Autoren: Shneider, Mikhail N. / Yatsenko, Nikolai A.
- ISBN: 978-1-351-41996-3
- EAN: 9781351419963
- Produktnummer: 25330919
- Verlag: Taylor & Francis Ltd.
- Sprache: Englisch
- Erscheinungsjahr: 2017
- Seitenangabe: 304 S.
- Plattform: PDF
- Masse: 31'347 KB
- Abbildungen: 276 equations, 7 schwarz-weiße Fotos, 4 schwarz-weiße Tabellen
Über den Autor
Raizer, Yuri P.; Shneider, Mikhail N.; Yatsenko, Nikolai A.
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