Enabling Technology for MEMS and Nanodevices
Advanced Micro and Nanosystems
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section…
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Produktdetails
Weitere Autoren: Tabata, Osamu (Hrsg.) / Fedder, Gary K. (Hrsg.) / Baltes, Henry (Hrsg.) / Korvink, Jan G. (Hrsg.) / Brand, Oliver (Hrsg.)
- ISBN: 978-3-527-67504-3
- EAN: 9783527675043
- Produktnummer: 15193980
- Verlag: Wiley-Vch
- Sprache: Englisch
- Erscheinungsjahr: 2013
- Seitenangabe: 439 S.
- Plattform: PDF
- Masse: 51'704 KB
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