Surface and Interface Effects in VLSI
VLSI Electronics Microstructure Science, Volume 10: Surface and Interface Effects in VLSI provides the advances made in the science of semiconductor surface and interface as they relate to electronics. This volume aims to provide a better understanding and control of surface and interface related properties. The book begins with an introductory chapter on the intimate link between interfaces and devices. The book is then divided into two parts. The first part covers the chemical and geometric structures of prototypical VLSI interfaces. Subjects detailed include, the technologically most important interface, Si-SiO2 and the interplay between i…
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Produktdetails
Weitere Autoren: Bauer, Robert S. (Hrsg.)
- ISBN: 978-1-4832-1776-5
- EAN: 9781483217765
- Produktnummer: 36168639
- Verlag: Elsevier Science & Techn.
- Sprache: Englisch
- Erscheinungsjahr: 2014
- Seitenangabe: 396 S.
- Plattform: PDF
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