Practical Aerosol Deposition & Applications of High-k Thin Film
High-k BaTiO Film Deposition Method
This book provides a low-temperature deposition method of ceramic-based high-k functional thick/thin films employing room-temperature aerosol deposition (AD) process. It's possible to deposit high density and quality ceramic films from initial nano-particles without any high-temperature process on almost any kinds of substrate. The AD process takes an advantage of the room-temperature deposition phenomenon for the embedded capacitor technology that is based on three-dimensional integration of passive components with the low-melting point materials such as metals and plastics. Consequently, in order to realize the embedded capacitor technologi…
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Produktdetails
Weitere Autoren: Yao, Z. / Kim, H. K.
- ISBN: 978-3-330-04264-3
- EAN: 9783330042643
- Produktnummer: 37547687
- Verlag: LAP Lambert Academic Publishing
- Sprache: Englisch
- Erscheinungsjahr: 2017
- Seitenangabe: 260 S.
- Masse: H22.0 cm x B15.0 cm x D1.6 cm 405 g
- Abbildungen: Paperback
- Gewicht: 405
Über den Autor
Prof. Nam-Young Kim was born in Seoul, Korea in 1960. He received two Masters and two Ph.D. degrees from State University of New York (SUNY) at Buffalo and Midwest University, U.S.A.; the M.S. and the Ph.D. in Electronic Engineering, SUNY at Buffalo in 1991 and 1994. He also received M. Div. and D. Div. in Midwest University in 2004 and 2006.
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