Plasma Processing for VLSI
VLSI Electronics: Microstructure Science, Volume 8: Plasma Processing for VLSI (Very Large Scale Integration) discusses the utilization of plasmas for general semiconductor processing. It also includes expositions on advanced deposition of materials for metallization, lithographic methods that use plasmas as exposure sources and for multiple resist patterning, and device structures made possible by anisotropic etching.This volume is divided into four sections. It begins with the history of plasma processing, a discussion of some of the early developments and trends for VLSI. The second section, Deposition, discusses deposition techniques for…
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Produktdetails
Weitere Autoren: Brown, Dale M. (Hrsg.)
- ISBN: 978-1-4832-1775-8
- EAN: 9781483217758
- Produktnummer: 36168635
- Verlag: Elsevier Science & Techn.
- Sprache: Englisch
- Erscheinungsjahr: 2014
- Seitenangabe: 544 S.
- Plattform: PDF
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