Zheng Cui

Nanofabrication

Principles, Capabilities and Limits

Buch

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication cha… Mehr

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Produktdetails

ISBN: 978-3-319-81875-7
EAN: 9783319818757
Produktnummer: 28388565
Verlag: Springer International Publishing
Sprache: Englisch
Erscheinungsjahr: 2018
Seitenangabe: 452 S.
Masse: H23.5 cm x B15.5 cm x D2.4 cm 680 g
Auflage: Softcover reprint of the original 2nd ed. 2017
Abbildungen: Paperback
Gewicht: 680

Über den Autor

Zheng Cui, PhD, is a professor at and Director of the Department of Printed Electronics at the Suzhou Institute of Nanotech and Nanobionics, Chinese Academy of Sciences. He received his PhD from Southeast University in Nanjing, China, and has been a Visiting Fellow at the Microelectronics Research Center at Cambridge University, as well as a Senior Scientist and Principal Scientist at Central Microstructure Facility in Rutherford Appleton Laboratory.