Nanofabrication Handbook
A comprehensive resource for this rapidly emerging discipline, this book includes detailed discussions of the underlying theoretical basis, the resolution, patterns, and substrates used as well as applications. It builds upon current understanding of microfabrication, moving into the nano dimension and demonstrating how work at this level calls for a different process. Most notably, the book provides guidance on particular lithographic techniques that better fit specific research needs. It includes coverage of how to approach key problems in the decision-making process related to materials, methods, surface considerations, and more.
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Produktdetails
Weitere Autoren: Kawata, Satoshi (Hrsg.)
- ISBN: 978-1-4200-9052-9
- EAN: 9781420090529
- Produktnummer: 23143383
- Verlag: Taylor and Francis
- Sprache: Englisch
- Erscheinungsjahr: 2012
- Seitenangabe: 546 S.
- Masse: H28.0 cm x B21.0 cm x D3.6 cm 1'724 g
- Abbildungen: farb. Abb.
- Gewicht: 1724
Über den Autor
Stefano Cabrini is director of the Nanofabrication Facility and member of the interfacility nanophotonics group and the single digit nano fabrication theme in the Molecular Foundry (a U.S. Department of Energy program) at the Lawrence Berkeley National Laboratory. His research interests include nanophotonics and metamaterials, semiconductor device fabrication, optical device fabrication, MEMS fabrication, and the development of new lithographic tools and processes.Satoshi Kawata is a professor of applied physics at Osaka University, chairman of Nanophoton Corp., and chief scientist of the Nanophotonics Laboratory at RIKEN. A fellow of the Optical Society of America, SPIE, and Institute of Physics, Dr. Kawata has been a recipient of the Medal of Purple Ribbon from the Japanese Emperor; the Science and Technology Award from the Japanese Ministry of Education, Culture, Sports, Science and Technology; the Da Vinci Award of Excellence from LMVH Moët Hennessy Louis Vuitton; and the Japan IBM Science Award. His research interests include nanophotonics, biophotonics, plasmonics, metamaterials, photonic crystals, and nanofabrication through two-photon absorption techniques.
5 weitere Werke von Stefano (Hrsg.) Cabrini:
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