Microtransducer CAD
Physical and Computational Aspects
Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing parasitic effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransduc…
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Produktdetails
Weitere Autoren: Baltes, Henry
- ISBN: 978-3-7091-6428-0
- EAN: 9783709164280
- Produktnummer: 37138524
- Verlag: Springer Vienna
- Sprache: Englisch
- Erscheinungsjahr: 2012
- Seitenangabe: 427 S.
- Plattform: PDF
- Auflage: 1999
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