Micromachined Ultrasound-Based Proximity Sensors
Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as well as appropriate packaging for ultrasound microsystems. Micromachined Ultrasound-Based Proximity Sensors describes a cost-effective approach to the realization of a micro electro mechanical system (MEMS). The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techn…
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Produktdetails
Weitere Autoren: Brand, Oliver
- ISBN: 978-1-4615-4997-0
- EAN: 9781461549970
- Produktnummer: 37137867
- Verlag: Springer US
- Sprache: Englisch
- Erscheinungsjahr: 2012
- Seitenangabe: 121 S.
- Plattform: PDF
- Auflage: 1999
- Reihenbandnummer: 4
1 weiteres Werk von Mark R. Hornung:
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