Metal - Semiconductor Contacts and Devices
VLSI Electronics Microstructure Science, Volume 13: Metal-Semiconductor Contacts and Devices presents the physics, technology, and applications of metal-semiconductor barriers in digital integrated circuits. The emphasis is placed on the interplay among the theory, processing, and characterization techniques in the development of practical metal-semiconductor contacts and devices.This volume contains chapters that are devoted to the discussion of the physics of metal-semiconductor interfaces and its basic phenomena; fabrication procedures; and interface characterization techniques, particularly, ohmic contacts. Contacts that involve polycryst…
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Produktdetails
Weitere Autoren: Gildenblat, Gennady Sh. / Einspruch, Norman G. (Hrsg.)
- ISBN: 978-1-4832-1779-6
- EAN: 9781483217796
- Produktnummer: 36168641
- Verlag: Elsevier Science & Techn.
- Sprache: Englisch
- Erscheinungsjahr: 2014
- Seitenangabe: 434 S.
- Plattform: PDF
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