Materials and Process Characterization
VLSI Electronics: Microstructure Science, Volume 6: Materials and Process Characterization addresses the problem of how to apply a broad range of sophisticated materials characterization tools to materials and processes used for development and production of very large scale integration (VLSI) electronics.This book discusses the various characterization techniques, such as Auger spectroscopy, secondary ion mass spectroscopy, X-ray topography, transmission electron microscopy, and spreading resistance. The systematic approach to the technologies of VLSI electronic materials and device manufacture are also considered.This volume is beneficial t…
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Produktdetails
Weitere Autoren: Larrabee, Graydon B. (Hrsg.)
- ISBN: 978-1-4832-1773-4
- EAN: 9781483217734
- Produktnummer: 36168637
- Verlag: Elsevier Science & Techn.
- Sprache: Englisch
- Erscheinungsjahr: 2014
- Seitenangabe: 614 S.
- Plattform: PDF
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