Fundamental Principles of Engineering Nanometrology
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.Provides a basic introduction to measurement and instruments Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry,…
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Produktdetails
- ISBN: 978-1-4377-7832-8
- EAN: 9781437778328
- Produktnummer: 35969830
- Verlag: Elsevier Science & Techn.
- Sprache: Englisch
- Erscheinungsjahr: 2009
- Seitenangabe: 352 S.
- Plattform: EPUB
Über den Autor
Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati
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