Developments in Surface Contamination and Cleaning - Fundamentals and Applied Aspects
Fundamentals and Applied Aspects
Surface contamination is of cardinal importance in a host of technologies and industries, ranging from microelectronics to optics to automotive to biomedical. Thus, the need to understand the causes of surface contamination and their removal is very patent. Generally speaking, there are two broad categories of surface contaminants: film-type and particulates. In the world of shrinking dimensions, such as the ever-decreasing size of microelectronic devices, there is an intensified need to understand the behavior of nanoscale particles and to devise ways to remove them to an acceptable level. Particles which were functionally innocuous a few ye…
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Produktdetails
Weitere Autoren: Mittal, Kashmiri L. (Hrsg.)
- ISBN: 978-0-8155-1685-9
- EAN: 9780815516859
- Produktnummer: 36175339
- Verlag: Elsevier Science & Techn.
- Sprache: Englisch
- Erscheinungsjahr: 2008
- Seitenangabe: 1200 S.
- Plattform: PDF
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