CMOS Hotplate Chemical Microsensors
This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and represent examples of the successful integratio…
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Produktdetails
Weitere Autoren: Barrettino, Diego / Baltes, Henry P. / Hierlemann, Andreas
- ISBN: 978-3-540-69561-5
- EAN: 9783540695615
- Produktnummer: 16459900
- Verlag: Springer Nature EN
- Sprache: Englisch
- Erscheinungsjahr: 2007
- Seitenangabe: 125 S.
- Masse: H23.5 cm x B15.5 cm 447 g
- Gewicht: 447
Über den Autor
93364948
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